1. Plasma-sufrace interctions and processing of materials
Author: / edited by Orlanso Auciello...
Library: Central Library and Documents Center of Tehran University (Tehran)
Subject: Materials -- Surfaces -- Congresses,Materials -- Effect of rediation on -- Congresses,Microelectronics -- Materials -- Effect of radiation on - Congresses,Plasma etching -- Congresses
Classification :
TA
418
.
7
.
N36
1988